1700C Multi-Channel Gas Controlled CVD Tube Furnace – PTC D60/300/17

CVD tube furnace PTC D60/300/17 features high vacuum level and high temperature up to 1700C with MoSi2 heaters. The furnace adopts an alumina tube size OD60mm and a pair of SS304 vacuum sealing flanges with needle valves & Gauge allow heating samples under vacuum or gas flow conditions. The CVD tube furnace is an ideal tool for laboratory daily use.

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Product Overview

CVD Tube Furnace workstation generally consists of a tube furnace, a precision mass flow gas control station, a high vacuum pump units and other assembling parts such as furnace tube, flanges, etc. Tmax 1700°C, the ultimate vacuum rate goes to 10^-5 torr with molecular vacuum pump units. The mass flow gas control station mixes three or more kinds of gas together and inputs the mixed gas into a quartz tube or metal tubes inside the furnace. This kind of tubular furnace is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and atmosphere protection.

Main Features
  • Tmax 1700°C
  • Dual steel structure, minium heat loss
  • 3-channel precise mass flow gas control
  • Multiple gas inlets and outlets
  • Max vacuum level 10E-5 torr
  • Powerful MoSi2 heating elemets ensure uniform temperature
  • PID controller with programmable 30 segments
  • Alumina tube and SS304 sealing flanges included
  • Dual flanges support provides better sealing and longer tube life
  • Non-Split furnace chamber to protect heat loss
  • Long life type B thermocouple
  • CE standard
Safety
  • Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
  • Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
  • Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
  • Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot
Product Gallery for the 1700C CVD Tube Furnace

CVD tube furnace

High Temperature 1400C Tube Furnace FLANGE

Flange Detail for Single Zone 1400C High Temperature Tube Furnace

Technical Specifications
Model No.PTC D60/300/17
Heating zoneZone length:300mm /12″
Uniform temp zone:140mm
Temperature uniformity +/- 5C
Power supply5KW
AC208-240V, 50/60Hz, 1 phase
Working temperatureTmax 1700°C (3092°F)
Continuously 1600°C (2912°F)
Temperature controllerYudian PID controller
Auto-tune function
Programmable 30 segments
Temperature accuracy +/- 1°C
Heating rate≤10°C / min
ThermocoupleB type
Furnace tubeMaterial: Alumina content 99.6%
Size: OD60, length 900mm
Vacuum flangesSS304 sealing flanges
Multiple gas inlets and outlets
Vacuum levelMax 10E-5 torr with molecular pump
Chamber liningMitsubishi Raw Material high alumina 1800# fiber board
Electronic componentsSchneider maker air switch, AC contactor, SSR Relay etc.
Heating elementPowerful MoSi2 rods
Shipping infoWeight: 265 kgs
W980xL600xH1360mm
ComplianceCE, ISO
WarrantyOne-year limited warranty with lifetime support
Application Notes
  • Don’t fill any explosive gasses such as Hydrogen or Methane into the tube without necessary safety controls and supervision.
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa.
  • Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating
Size Comparison
Item namePTC D40/300/17PTC D80/300/17PTC D100/300/17
Heating length300mm300mm300mm
Tube sizeOD40xL900mmOD80xL900mmOD100xL900mm
Power3 KW4 KW7 KW
Weight185 KGS238 KGS356 KGS

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