1200C Multi-Zone CVD Tube Furnace (OD120mm, 3 Zones)

PTC D120/1000/12/3 is a multi zone CVD tube furnace, features four heating zones with total length of 1000mm, the processing furnace tube material is inconel 600. Equiped with a diffusion vacuum pump unit, max vacuum level 10E-7 torr. The Multi Zone CVD tube furnace is an ideal for sample annealing, diffusion and sintering in a various gas atmosphere up to 1200°C.

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Product Overview

Multi-Zone CVD Tube Furnace workstation consists of a multi heating zones tube furnace, a precision mass flow gas control station, a high vacuum pump units and other assembling parts such as furnace tube, flanges, etc. Tmax 1200°C, the ultimate vacuum rate goes to 10^-7 torr with molecular vacuum pump units. The mass flow gas control station mixes three or more kinds of gas together and inputs the mixed gas into a quartz tube or metal tubes inside the furnace. Multi-Zone Tube Furnace is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and atmosphere protection.

Main Features
  • Tmax 1200°C
  • Horizontal, Split, Multi-zone, CVD tube furnace
  • Inconel 600 as processing tube
  • Max vacuum level 10E-7 torr
  • 3-channel precise mass flow gas control
  • Multi-heating zones controlled separately ensure an improved temperature gradient
  • Dual flanges support provides better sealing and longer tube life
  • Type N thermocouples
  • CE certified, standard
  • Built-in ammeter and dual voltmeters for easy monitoring and troubleshooting.
  • Overheat protection shuts down the CVD tube furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
  • Power failure protection resumes furnace operation right after the point of failure when power is reestablished.
  • Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot
Technical Specifications
Model No.PTC D120/1000/12/3
Heating zoneFour heating zones
Zone length:750mm /30″
Uniform temp zone:500mm
Temperature uniformity +/- 5C
Power supply15KW
AC380-415V, 50/60Hz, 3-phase
Working temperatureTmax 1200°C (2192°F)
Continuously 1100°C (2012°F)
Temperature controllerShimaden PID controller
Auto-tune function
Programmable 32 segments
Temperature accuracy +/- 1°C
Heating rate≤25°C / min
ThermocoupleN type, four pcs
Furnace tubeMaterial: Quartz or Metal
Size:OD120, length 1800mm
Vacuum flangesSS304 sealing flanges
Multiple gas inlets and outlets
Vacuum levelMax 10E-7 torr with molecular pump
Chamber liningMitsubishi Raw Material high alumina 1500# fiber board
Electronic componentsSchneider maker air switch, AC contactor, SSR Relay etc.
Heating elementHRE resistance coil wire
Shipping infoWeight: 660 kgs
ComplianceCE, ISO
WarrantyOne-year limited warranty with lifetime support
Application Notes
  • Don’t fill any explosive gasses such as Hydrogen or Methane into the CVD furnace tube without necessary safety controls and supervision.
  • Tube furnaces with metal tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa.
  • Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating
Size Comparison
Item namePTC D40/440/12PTC D80/440/12PTC D100/440/12
Heating length440mm440mm440mm
Tube sizeOD40xL800mmOD80xL1000mmOD100xL1000mm
Power4 KW7 KW8 KW
Weight108 KGS275 KGS360 KGS

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